Titanium sputtering targets are widely used in semiconductor manufacturing, optical coating, decorative coating, and advanced thin-film applications. The quality of the sputtering target directly affects film uniformity, adhesion strength, and final product performance.
At Sunrise Industrial, we provide high purity titanium sputtering targets with strict quality control and precision CNC machining capability to meet demanding industrial standards.
Raw Material Selection
The manufacturing process begins with high purity titanium material selection.
We commonly use:
Commercially Pure Titanium (Grade 1 / Grade 2)
Titanium Grade 5 (Ti-6Al-4V) upon request
Material purity, density, and internal structure consistency are carefully controlled to ensure:
Stable sputtering rate
Uniform thin film deposition
Low contamination risk
All materials are traceable with mill test certificates.
Melting & Forging Process
Titanium ingots are produced through vacuum melting processes to minimize gas content and impurities.
Key steps include:
Vacuum melting or VAR (Vacuum Arc Remelting)
Forging and hot rolling
Heat treatment (if required)
These processes improve density and structural uniformity, which are critical for high-performance sputtering applications.
Precision CNC Machining
After forging, titanium blanks are machined into required shapes and dimensions.
Our machining capabilities include:
CNC turning
CNC milling
Surface grinding
Custom size machining according to drawing
Strict tolerance control ensures:
✔ Flatness precision
✔ Surface finish consistency
✔ Accurate thickness control
✔ Dimensional stability
Proper machining reduces cracking risk during sputtering.
Bonding & Backing Plate (Optional)
For certain applications, titanium targets may require bonding to a backing plate (such as copper) for improved heat dissipation.
We provide:
Indium bonding
Diffusion bonding
Customized bonding solutions
Reliable bonding ensures efficient thermal conductivity and long service life during sputtering operations.
Quality Inspection & Testing
Every titanium sputtering target undergoes strict inspection:
Chemical composition analysis
Ultrasonic testing (UT)
Dimensional inspection
Surface quality examination
Optional third-party testing is available upon request.
All production follows ISO9001:2015 quality management standards.
Applications of Titanium Sputtering Targets
Titanium sputtering targets are used in:
Semiconductor industry
Optical coatings
Decorative PVD coatings
Solar cell manufacturing
Electronic thin-film deposition
High purity and stable density are critical for consistent coating performance.
Conclusion
The performance of titanium sputtering targets depends on material purity, structural integrity, precision machining, and reliable bonding technology.
Sunrise Industrial provides high quality titanium sputtering targets with consistent performance and competitive lead time for global industrial customers.
For technical discussion or customized requirements, feel free to contact our team.
